Physical Properties of Substrates
Substrate | 99.9% Alumina |
99.5% Alumina |
96% Alumina |
Zirconia Ceraflex®-A |
Zirconia-3Y | Zirconia Ceraflex®-8Y |
Zirconia-8Y | Aluminum Nitride | Dielectric substrate | Synthetic Fused Quarts |
|||
---|---|---|---|---|---|---|---|---|---|---|---|---|---|
Material | 99.9%Al2O3 | 99.5%Al2O3 | 96%Al2O3 | 3Y-ZrO2 | 8Y-ZrO2 | AlN | - | SiO2 | |||||
Density [ g/ ㎤ ] |
JISR1634 | 3.9 | 3.9 | 3.8 | 6.0 | 6.0 | 5.8 | 5.8 | 3.3 | 5 | 4.48 | 4.25 | 2.2 |
Flexural Strength [MPa] |
25℃ JISR1601 |
660 | 440 | 300 | 1200 | 1200 | 250 | 250 | 330 | - | - | - | 60 |
Linear Expansion Coefficient [1/K] |
25~800℃ JISR1618 |
8 × 10-6 | 8 × 10-6 | 8 × 10-6 | 1.1 × 10-5 | 1.1 × 10-5 | 1.0 × 10-5 | 1.0 × 10-5 | 4.6 × 10-6 | - | - | - | 0.5 × 10-6 |
Thermal Conductivity [W/m・K] |
25℃ JISR1611 |
33 | 32 | 23 | 3.2 | 2.9 | 1.9 | 1.9 | 170 200 230 Selectable |
- | - | - | 1.4 |
Young's Modulus [GPa] |
JISR1602 | 390 | 380 | 340 | 210 | 210 | - | - | 330 | - | - | - | - |
Poisson's Ratio [ - ] |
- | 0.25 | 0.25 | 0.23 | 0.31 | 0.31 | - | - | 0.24 | - | - | - | - |
Dielectric Constant [ - ] |
25℃ 1MHz |
- | - | 9.6 | 30 | 32 | 25 | 25 | 8.8 | - | 86 | 118 | 3.77 |
25℃ 10GHz |
10 | 9.8 | - | - | - | - | - | - | 38 | - | - | - | |
Dissipation Factor [ - ] |
25℃ 1MHz |
- | - | 2 × 10-4 | 4 × 10-3 | 2.5× 10-3 | 4 × 10-3 | 4.5 × 10-3 | 5 × 10-4 | - | 2.5× 10-3 | 2.5× 10-3 | 1 × 10-4 |
25℃ 10GHz |
2 × 10-5 | 3 × 10-5 | - | - | - | - | - | - | 3.3× 10-4 | - | - | - | |
Volume Resistivity [Ω・cm] |
JISC2141 | 1015 | 1015 | 1014 | 1012 | 1012 | 1012 | 1012 | 1012 | 1012 | 1012 | 1012 | 1016 |
Surface Roughness* (As fired)(Ra) [μm] |
- | 0.03 | 0.1 | 0.3 | 0.1 | 0.1 | 0.1 | 0.1 | - | - | - | - | - |
Thickness [mm] |
- | 0.1~0.38 | 0.5~1.0 | 0.635 0.8 1.0 |
0.3~0.8 | 0.05~0.3 | 0.3~0.8 | 0.1~0.3 | - | - | - | - | - |
Substrate | 99.9% Alumina |
99.5% Alumina |
96% Alumina |
Zirconia Ceraflex®-A |
Zirconia-3Y | Zirconia Ceraflex®-8Y |
Zirconia-8Y | Aluminum Nitride |
Dielectric substrate | Synthetic Fused Quarts |
Please feel free to make inquiries in regard to other sizes and thicknesses.
In addition, we are able to provide mirror finishing with a surface roughness of Ra=0.02 μm or less using our unique polishing technology.
*The surface roughness is that of the front surface.
The above property values are not guaranteed values.
For the purpose of improvements, the property values are subject to change without prior notice.